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金凸塊製程售出之機台 |
| 製程順序 | 財產編號 | Elglish name | 中文名稱 | 規格型號 | 數量 | 取得日期 | 資產價值 |
| 濺鍍製程 | |||||||
| C3306C0008 | vacuum sputter | 8吋真空濺鍍機 | UNAXIS／BPS CL-200 8"SPUTTER | 1 | 1999/2/28 | 64,493,566 | |
| C3306C0021 | 6"& 8" Automatic Wet Scrubber | 晶圓清洗機 | M.SETEK CO.,LTD／VS-8000 | 1 | 2003/1/1 | 9,597,276 | |
| C3306C0022 | 6"& 8" Automatic Wet Scrubber | 晶圓清洗機 | M.SETEK CO.,LTD／VS-8000 | 1 | 2005/12/1 | 10,506,882 | |
| D4106C0012 | Stress and wafer bow mapp | 應力機(高度機) | Frontier Semiconductor Measurements Inc.／FSM128 | 1 | 2006/10/27 | 2,020,410 | |
| 黃光製程 | C3206C0005 | Spin Coater | 光阻塗佈機 | M.SETEK CO.,LTD／VRC-8000 | 1 | 2000/2/29 | 15,228,677 |
| C3206C0007 | Spin Coater | 光阻塗佈機 | M.SETEK CO.,LTD／M1391/VRC8 | 1 | 2006/6/16 | 14,147,349 | |
| D4106C0102 | MTS88 Coater Track1 | 光阻塗佈機 | 宏騏科技／ MTS88 Coater Track | 1 | 2000/2/29 | 10,717,303 | |
| C3206C0014 | Ultratech Stepper | 步進機 | (1997/04/16) ULTRA TECH／Titan 4700 | 1 | 1999/5/31 | 35,441,096 | |
| C3206C0021 | Ultratech Stepper Refurbi | 步進機 | (1995/12/09) ULTRA TECH／Titan/RDS S/N.2298 | 1 | 2005/12/1 | 28,201,830 | |
| C320760001 | Ultratech Stepper | 步進機 | (2000/11/23) ULTRA TECH／Titan 4700 | 1 | 2007/6/30 | 26,327,483 | |
| C3206C0022 | Ultratech Stepper | 步進機 | (2001/06/27) ULTRA TECH／Titan I(1.4um) | 1 | 2004/7/1 | 44,135,789 | |
| C3206C0008 | Developer | 顯影機 | RITE TRACK EQUIPMENT SERVICES INC.／8832E | 1 | 1998/2/28 | 4,003,779 | |
| C3206C0009 | Developer | 顯影機 | RITE TRACK EQUIPMENT SERVICES INC.／8832E | 1 | 2001/3/20 | 11,170,366 | |
| C3206C0010 | Developer | 顯影機 | RITE TRACK EQUIPMENT SERVICES INC.／88(8832E) | 1 | 2002/10/1 | 7,041,018 | |
| C3206C0011 | Ritetrack Developer | 顯影機 | RITE TRACK EQUIPMENT SERVICES INC.／8832E | 1 | 2005/12/1 | 5,279,997 | |
| C3206C0012 | Ritetrack Developer | 顯影機 | RITE TRACK EQUIPMENT SERVICES INC.／8832E | 1 | 2005/12/1 | 5,279,997 | |
| C3206C0013 | dry etching machine Plasma Photoresist | 乾蝕刻機 | OXFORD／PRS900 | 1 | 1998/2/28 | 5,086,822 | |
| C3206C0006 | Plasma Photoresist | 電漿光阻去除機 | NARC／stripper 340 | 1 | 2006/5/15 | 2,500,000 | |
| C3206C0002 | Plasma Cleaner | 電漿清洗機 | FUJITSU VLSI／VA-1000 | 1 | 2004/12/1 | 21,199,900 | |
| C3206C0023 | Wafer Edge Exposure | 曝邊機 | USIHO PE250R2 | 1 | 2005/12/21 | 6,592,271 | |
| C3206C0039 | 6"& 8" Automatic Wet Scrubber | 晶圓清洗機 | 宏騏科技／6吋 & 8吋 MTS88 Sc | 1 | 2005/6/30 | 4,872,975 | |
| C3207A0001 | Photo-RS clean | 去光阻機 | 囿誠企業有限公司／Q009004 | 1 | 2007/9/6 | 145,000 | |
| C3506C0005 | SPIN DRY | 旋乾機 | RHETECH INC.／SEMITOOL PS-101-6" | 1 | 2000/11/23 | 653,317 | |
| D4106C0036 | lamp power meater | 量測UV Lamp能量用儀器 | OPTICAL ASSOCIATES INC. | 1 | 2005/12/1 | 360,000 | |
| D4106C0043 | Wafer Loader | Wafer自動取片機 | NIKON／NWL-860 | 1 | 2000/10/31 | 1,143,243 | |
| 電鍍製程 | C3406C0052 | Au bump plater 14CUP | 金凸塊電鍍機 | SSC／14cup | 1 | 2005/12/7 | 21,995,500 |
| C3406C0053 | Au bump plater 14CUP | 金凸塊電鍍機 | 凡禾科技／14Cups | 1 | 2006/2/15 | 13,200,000 | |
| C3406C0054 | Au bump plater 14CUP | 金凸塊電鍍機 | 凡禾科技／14Cups | 1 | 2006/2/15 | 12,250,000 | |
| C3406C0055 | Au bump plater 6CUP | 金凸塊電鍍機 | 嵩展科技／６Cups | 1 | 2006/2/17 | 3,838,000 | |
| C3406C0056 | Au bump plater 6CUP | 金凸塊電鍍機 | 嵩展科技／６Cups | 1 | 2006/4/11 | 5,258,285 | |
| C3406C0057 | Au bump plater 6CUP | 金凸塊電鍍機 | 嵩展科技／６Cups | 1 | 2006/4/11 | 5,258,285 | |
| C3406C0069 | port clean | 清洗機 | 囿誠企業有限公司／Q009001 | 1 | 2000/11/14 | 250,000 | |
| C3506C0024 | etch by chemical | 化學蝕刻機 | 囿誠企業有限公司／Q009003 | 1 | 2000/11/14 | 1,355,000 | |
| D4106C0052 | Wafer Loader | Wafer自動取片機 | NIKON／NWL860-TMB | 1 | 2005/12/31 | 1,213,267 | |
| D4106C0105 | microsopce camera | 顯微鏡照相機 | Mitsubishi／CP910U | 1 | 2005/11/1 | 80,000 | |
| 蝕刻製程 | C3206C0001 | Plasma Cleaner | 乾蝕刻機 | OXFORD／PRS900 | 1 | 2001/8/3 | 4,793,699 |
| C3506C0014 | Photo-RS by chemical | 化學去光阻機 | 拓技科技 | 1 | 1998/7/31 | 1,545,000 | |
| C3506C0015 | Photo-RS by chemical | 化學去光阻機 | 拓技科技 | 1 | 2000/2/29 | 126,000 | |
| C3506C0016 | Photo-RS clean | 去光阻機 | 禾邑實業／TOK 半自動 Chemica | 1 | 2000/2/29 | 4,153,333 | |
| C3506C0017 | etch gold(Au) | 去光阻機 | 禾邑實業／KII2半自動 CHEMIC | 1 | 2000/2/29 | 3,951,333 | |
| C3506C0018 | etch Ti-W | 金蝕刻機 | 寶笙科技／H202半自動 Chem | 1 | 2006/3/1 | 5,418,334 | |
| C3506C0001 | Spin Dryer | 旋乾機 | VERTEQ ／SUPERCLEAN 1600 | 1 | 1998/2/28 | 852,558 | |
| C3506C0021 | Spin Dryer | 旋乾機 | ASSI／SC-802 8吋 | 1 | 2005/11/11 | 742,000 | |
| C3506C0022 | Spin Dryer | 旋乾機 | ASSI／SC-802 8吋 | 1 | 2005/11/11 | 762,000 | |
| C3506C0023 | SPIN DRY | 旋乾機 | ASSI／SC-802 | 1 | 2006/2/27 | 670,000 | |
| C3506C0034 | parts Cleaner | 清洗機 | 囿誠企業有限公司／Q009002 | 1 | 2000/11/14 | 250,000 | |
| 出貨檢驗區 | C3406C0003 | Two Stages Wafer Transfer | 自動晶舟轉換機 | R2D／SORTER | 1 | 2006/7/27 | 1,266,292 |
| D4106C0061 | Automatic Optical Inspection-AOI | 外觀全檢機 | MICRON VISION CORP.／MV-3000-3D | 1 | 2006/12/4 | 19,996,796 | |
| D4106C0062 | Automatic Optical Inspection-AOI | 外觀全檢機 | MICRON VISION CORP.／MV 3000-3D | 1 | 2003/12/1 | 26,659,398 | |
| D4106C0063 | Automatic Optical Inspection-AOI | 外觀全檢機 | MICRON VISION CORP.／MV3200-3D | 1 | 2006/10/31 | 19,530,000 | |
| D4106C0072 | Micro Hardness Tester | 微小硬度機 | SHIMADZU CORPORATION／HMV-2T | 1 | 2005/12/1 | 580,000 | |
| D410890001 | MV 3000-3D+2D wafer Inspection | 外觀全檢機 | MICRON VISION CORP.／MV 3000-2+3D | 1 | 2008/5/28 | 25,080,000 | |
| D410890002 | MV 3000-3D+2D wafer Inspection | 外觀全檢機 | MICRON VISION CORP.／MV 3000-2+3D | 1 | 2008/5/28 | 25,080,000 | |
| D4106C0101 | Automatic Optical Inspection-AOI | 外觀全檢機 | MICRON VISION CORP.／MV 3000-3D | 1 | 2004/6/30 | 21,288,089 | |
| 烤箱區 | |||||||
| C3406C0065 | out-gas oven | 無塵烤箱 | 鑫力／CLO-A3-T3NCR | 1 | 2005/10/4 | 830,000 | |
| C3406C0067 | Vacuum Dry Oven-Rud-60L | 真空烤箱 | RUD-60L | 1 | 2005/12/5 | 800,000 | |
| D4106C0034 | Surface Scanner | 表面粒子掃描儀 | KLA Tencor／6420 | 1 | 2005/12/13 | 6,392,924 | |
| D4106C0035 | Surface Scanner | 表面粒子掃描儀 | NANO PHOTONICS／Reflex AC150 | 1 | 2005/12/13 | 7,989,380 | |
| D4106C0070 | micro hardness meter | 微小硬度機 | SHIMADZU CORPORATION／HMV-2 | 1 | 2001/6/12 | 610,000 | |
| D4106C0071 | micro hardness meter | 微小硬度機 | SHIMADZU CORPORATION／HMV-2T | 1 | 2002/9/12 | 575,000 | |
| 線邊倉 | T9906C0001 | 8" wafer manual select | 8吋手動晶圓挑片器 | FORTUNA／T5WE8 | 1 | 2004/6/1 | 65,000 |
| 鋼瓶室 | C3306C0005 | Vacuum Pump | 真空泵浦 | DRY VAC LEYBOLD VACUUM Products INC.／25B | 1 | 1998/5/31 | 580,000 |
| C3306C0006 | Vacuum Pump | 真空泵浦 | DRY VAC LEYBOLD VACUUM Products INC.／25B | 1 | 1998/5/31 | 580,000 | |
| C3306C0024 | vacuum pump compressor | 真空幫浦壓縮機 | CRC-870 | 1 | 2004/1/16 | 317,000 | |
| C3406C0042 | Au bump plater | 電鍍機 | CW3 2-CUP | 1 | 2002/9/10 | 1,261,614 | |
| D4106C0079 | CCD array camera | 儀器用照像機 | Basler L104K-2k | 1 | 2003/3/3 | 241,500 | |
| 更衣區 | D4206C0045 | Electrostatic Field Meter | 手環導電鞋量測儀器 | STSTIC SOLUTIONS INC.／CT-8700 combo Meter | 1 | 1998/7/31 | 50,000 |
| 包裝區 | T9906C0002 | 真空包裝機 | TY-900D | 1 | 2005/6/27 | 150,000 | |
| C3606C0128 | 真空包裝機 | TY-900加大型 | 1 | 2006/9/8 | 150,000 |
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